Mastering Semiconductor Key Modules for Enhanced CMOS Process Integration and Device Performance
About This Course
This course, Mastering Semiconductor Key Modules for Enhanced CMOS Process Integration and Device Performance, is designed to provide participants with comprehensive knowledge of the critical CMOS process modules used in semiconductor manufacturing. You will learn to identify key process modules such as photolithography, etching, and ion implantation, and understand their interactions within CMOS technology flows. The course emphasizes process control and cleanroom manufacturing standards for producing high-performance devices.
In the second part, participants will focus on process integration and device performance metrics, learning to assess and verify the performance of CMOS devices according to product specifications. You will explore future IC technologies such as Chiplet, FINFET, and GAAFET, while gaining insight into statistical process control, reliability performance, and packaging innovations.
What You'll Learn
LO1: Identify process flows and modules for specific CMOS technologies in manufacturing
LO2: Determine CMOS device performance and verify process integration in accordance to product specifications.
Course Outline:
Topic 1: CMOS Process Modules and Process Flow
• CMOS process modules
o Photolithography and Mask
o Etch
o Clean
o Ion Implantation
o Diffusion and RTP
o Film
o CMP
• CMOS process flows
Topic 2: CMOS Process Integration and Performance
• CMOS process integration and sort yield
• CMOS device and reliability performances
• Statistical process control
• Packaging technologies
• Overview of future IC technologies – Chiplet, FINFET and GAAFET
Entry Requirements
Knowledge and Skills
• Able to operate using computer functions
• Minimum Polytechnic Diploma
• Basic programming skill, preferably Python.
Attitude
• Positive Learning Attitude
• Enthusiastic Learner
Experience
• Minimum of 1 year of working experience.